99.999% Nitrogen Generator,Nitrogen Generator 99.999% Purity,10Nm3/H Nitrogen Generator 99.999% Purity,20Nm3/H Nitrogen Generator 99.999% Jiangsu Minnuo Group Co.,Ltd , https://www.mngroupcn.com
1.High speed turbo vacuum pump(600L/S) is directly equipped into a station as picture show for max. vacuum level
2.Heavy duty dual stage mechanical pump, 220 liters/minute (7.8CFM) is connected to turbo pump for faster pumping speed
3.Mobile pump station is included and the compact sputtering coater can be placed on top of station
4.Max. vacuum level: 10^-6 torr with chamber baking
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Model
FF-160
Pumping Speed(/l/s,Air)
600
Inlet Flange
DN160 ISO-K
Outlet Flange
KF 40 (DN)
Ultimate Vacuum(Pa)
≤ 6x10-4Pa
Rotation Speed(rpm)
36000
Run-Up Time(min.)
<Â 6
Bearing Type
Ceramic
VIB(um)
≤ 0.1
Backing Pump (l/s)
4-8
Cooling Method,optional
Water
Cooling Water Temperature(ºC)
≤ 25
Bake-out temperature(ºC)
≤ 100
Ambient Temperature (ºC)
S-40
Lubrication
Oil
Mounting or lentation
Vertical ±5°
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High speed turbo vacuum pump
1.High speed turbo vacuum pump(600L/S) is directly equipped into a station as picture show for max. vacuum level
2.Heavy duty dual stage mechanical pump, 220 liters/minute (7.8CFM) is connected to turbo pump for faster pumping speed
3.Mobile pump station is included and the compact sputtering coater can be placed on top of station
4.Max. vacuum level: 10^-6 torr with chamber baking
Â
Model
FF-160
Pumping Speed(/l/s,Air)
600
Inlet Flange
DN160 ISO-K
Outlet Flange
KF 40 (DN)
Ultimate Vacuum(Pa)
≤ 6x10-4Pa
Rotation Speed(rpm)
36000
Run-Up Time(min.)
<Â 6
Bearing Type
Ceramic
VIB(um)
≤ 0.1
Backing Pump (l/s)
4-8
Cooling Method,optional
Water
Cooling Water Temperature(ºC)
≤ 25
Bake-out temperature(ºC)
≤ 100
Ambient Temperature (ºC)
S-40
Lubrication
Oil
Mounting or lentation
Vertical ±5°
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Oil Free High Speed High Vacuum Dry Pump
Model NO.: FF-160
Outlet Flange: Kf 40 (Dn)
Inlet Flange: Dn160
Bearing Type: Ceramic
Run-up Time(Min.): <6
Vib(Um): ≤ 0.1
Cooling Method: Water
Rotation Speed(Rpm): 36000
Name: Oil Free High Vacuum Pump
Trademark: CY
Transport Package: Wooden Box
Specification: 600L/S
Origin: Zhengzhou, China
HS Code: 8414100090
Model NO.: FF-160
Outlet Flange: Kf 40 (Dn)
Inlet Flange: Dn160
Bearing Type: Ceramic
Run-up Time(Min.): <6
Vib(Um): ≤ 0.1
Cooling Method: Water
Rotation Speed(Rpm): 36000
Name: Oil Free High Vacuum Pump
Trademark: CY
Transport Package: Wooden Box
Specification: 600L/S
Origin: Zhengzhou, China
HS Code: 8414100090
High speed turbo vacuum pump